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China's first maskless "lithography machine" was successfully developed
On December 25th, the Hefei Economic Development Zone Management Committee announced a major breakthrough in China's semiconductor industry. The first domestically developed non-mask (direct write) lithography machine with world-leading performance and full independent intellectual property rights has been successfully created in Hefei. This achievement marks a significant milestone, breaking China's long-standing reliance on imported sub-micron lithography machines and opening the door to greater technological self-reliance.
Lithography machines are considered the most critical equipment in chip manufacturing, as they are used to create intricate circuit patterns on electronic components. Given that China is the largest consumer of integrated circuits globally—accounting for over 24% of the world’s total demand—the country has long struggled with a low self-sufficiency rate, which remains below 10%. Recognizing this challenge, the national "Eleventh Five-Year Plan" prioritized the development of key manufacturing equipment, including advanced lithography systems.
The maskless (direct write) lithography machine developed in Hefei boasts a resolution of 0.65 microns and can be applied across various industries such as semiconductors, biotechnology, medicine, optoelectronics, solar energy, new energy, and thin-film circuits. This versatility makes it a game-changer for multiple sectors, enhancing China’s capabilities in high-tech manufacturing.
The project was spearheaded by Core Semiconductor (China) Co., Ltd., which began development after relocating to Hefei in December 2006. Remarkably, the company managed to produce its first prototype within just one year. Looking ahead, the company plans to move into mass production, with the first phase of the project expected to be completed by September next year. This progress signals not only technological advancement but also a growing confidence in China’s ability to lead in cutting-edge semiconductor technologies.